Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665518 | Photoresist and monomer and polymer for composing the photoresist | Kaichiro Nakano, Takeshi Ohfuji, Etsuo Hasegawa | 1997-09-09 |
| 5635332 | Alkylsulfonium salts and photoresist compositions containing the same | Kaichiro Nakano, Shigeyuki Iwasa, Etsuo Hasegawa | 1997-06-03 |