Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700520 | Low temperature, high pressure silicon deposition method | David K. Carlson | 1997-12-23 |
| 5695819 | Method of enhancing step coverage of polysilicon deposits | Mahalingam Venkatesan | 1997-12-09 |
| 5645646 | Susceptor for deposition apparatus | Mahalingam Venkatesan, Roger N. Anderson | 1997-07-08 |
| 5614257 | Low temperature, high pressure silicon deposition method | Mali Venkatesan | 1997-03-25 |
| 5607724 | Low temperature high pressure silicon deposition method | David K. Carlson | 1997-03-04 |
| 5599397 | Semiconductor wafer process chamber with suspector back coating | Roger N. Anderson, H. Peter W. Hey, Mahalingam Venkatesan | 1997-02-04 |