Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650082 | Profiled substrate heating | — | 1997-07-22 |
| 5645646 | Susceptor for deposition apparatus | Israel Beinglass, Mahalingam Venkatesan | 1997-07-08 |
| 5599397 | Semiconductor wafer process chamber with suspector back coating | H. Peter W. Hey, Israel Beinglass, Mahalingam Venkatesan | 1997-02-04 |