Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5599397 | Semiconductor wafer process chamber with suspector back coating | Roger N. Anderson, Israel Beinglass, Mahalingam Venkatesan | 1997-02-04 |
HH
H. Peter W. Hey
Overall (1997): #146,069 of 185,788Top 80%
1
Patents 1997