Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695819 | Method of enhancing step coverage of polysilicon deposits | Israel Beinglass | 1997-12-09 |
| 5645646 | Susceptor for deposition apparatus | Israel Beinglass, Roger N. Anderson | 1997-07-08 |
| 5599397 | Semiconductor wafer process chamber with suspector back coating | Roger N. Anderson, H. Peter W. Hey, Israel Beinglass | 1997-02-04 |