Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650614 | Optical scanning system utilizing an atomic force microscope and an optical microscope | Masatoshi Yasutake | 1997-07-22 |
| 5590672 | Semiconductor cleaning apparatus and wafer cassette | Masashi Ohmori, Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Satoru Kotoh | 1997-01-07 |