Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5590672 | Semiconductor cleaning apparatus and wafer cassette | Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Naohiko Fujino, Satoru Kotoh | 1997-01-07 |
MO
Masashi Ohmori
Overall (1997): #107,990 of 185,788Top 60%
1
Patents 1997