Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5590672 | Semiconductor cleaning apparatus and wafer cassette | Masashi Ohmori, Hiroshi Tanaka, Hiroshi Sasai, Naohiko Fujino, Satoru Kotoh | 1997-01-07 |
AN
Akira Nishimoto
Overall (1997): #179,779 of 185,788Top 100%
1
Patents 1997