Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5690540 | Spiral grooved polishing pad for chemical-mechanical planarization of semiconductor wafers | Michael A. Walker | 1997-11-25 |
| 5658438 | Sputter deposition method for improved bottom and side wall coverage of high aspect ratio features | John H. Givens | 1997-08-19 |