Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658438 | Sputter deposition method for improved bottom and side wall coverage of high aspect ratio features | Richard L. Elliott | 1997-08-19 |
| 5605862 | Process for making low-leakage contacts | Charles W. Koburger, III, Jerome B. Lasky | 1997-02-25 |