Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5690540 | Spiral grooved polishing pad for chemical-mechanical planarization of semiconductor wafers | Richard L. Elliott | 1997-11-25 |
| 5686038 | Resin transfer molding of composite materials that emit volatiles during processing | Stephen Christensen | 1997-11-11 |
| 5652164 | Semiconductor processing methods of forming stacked capacitors | Charles H. Dennison | 1997-07-29 |
| 5649262 | Film cleaning apparatus and method | Terence Andrew Watts | 1997-07-15 |
| 5645737 | Wet clean for a surface having an exposed silicon/silica interface | Karl M. Robinson | 1997-07-08 |
| 5616069 | Directional spray pad scrubber | Karl M. Robinson | 1997-04-01 |