Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658190 | Apparatus for separating wafers from polishing pads used in chemical-mechanical planarization of semiconductor wafers | David Q. Wright, Mike Walker | 1997-08-19 |
| 5645737 | Wet clean for a surface having an exposed silicon/silica interface | Michael A. Walker | 1997-07-08 |
| 5624303 | Polishing pad and a method for making a polishing pad with covalently bonded particles | — | 1997-04-29 |
| 5616069 | Directional spray pad scrubber | Michael A. Walker | 1997-04-01 |