Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643640 | Fluorine doped plasma enhanced phospho-silicate glass, and process | Ashima B. Chakravarti, Terry M. Cheng, Son Van Nguyen | 1997-07-01 |
| 5603988 | Method for depositing a titanium or tantalum nitride or nitride silicide | Ravi Kanjolia, Ben C. Hui, Paul F. Seidler, Karen L. Holloway, Richard A. Conti +1 more | 1997-02-18 |