Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672537 | Method for preparing a narrow angle defined trench in a substrate | Daniel Carl, Donald M. Kenney, Walter E. Mlynko | 1997-09-30 |
| 5643640 | Fluorine doped plasma enhanced phospho-silicate glass, and process | Ashima B. Chakravarti, Terry M. Cheng, Michael J. Shapiro | 1997-07-01 |