Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5603988 | Method for depositing a titanium or tantalum nitride or nitride silicide | Michael J. Shapiro, Ben C. Hui, Paul F. Seidler, Karen L. Holloway, Richard A. Conti +1 more | 1997-02-18 |