Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665905 | Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it | Thomas Bayer, Johann Greschner, Martin Nonnenmacher, deceased, Helga Weiss | 1997-09-09 |
| 5658472 | Method for producing deep vertical structures in silicon substrates | Johann Greschner, Robert Junginger, Georg Kraus | 1997-08-19 |
| 5641610 | Method for producing a multi-step structure in a substrate | Johann Greschner, Karl Probst, Gerhard Schmid | 1997-06-24 |
| 5635337 | Method for producing a multi-step structure in a substrate | Johann Greschner, Karl Probst, Gerhard Schmid | 1997-06-03 |