Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665905 | Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it | Johann W. Bartha, Thomas Bayer, Martin Nonnenmacher, deceased, Helga Weiss | 1997-09-09 |
| 5658472 | Method for producing deep vertical structures in silicon substrates | Johann W. Bartha, Robert Junginger, Georg Kraus | 1997-08-19 |
| 5646339 | Force microscope and method for measuring atomic forces in multiple directions | Thomas Bayer, Martin Nonnenmacher, deceased | 1997-07-08 |
| 5641610 | Method for producing a multi-step structure in a substrate | Johann W. Bartha, Karl Probst, Gerhard Schmid | 1997-06-24 |
| 5635337 | Method for producing a multi-step structure in a substrate | Johann W. Bartha, Karl Probst, Gerhard Schmid | 1997-06-03 |