Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658472 | Method for producing deep vertical structures in silicon substrates | Johann W. Bartha, Johann Greschner, Georg Kraus | 1997-08-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658472 | Method for producing deep vertical structures in silicon substrates | Johann W. Bartha, Johann Greschner, Georg Kraus | 1997-08-19 |