Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5628828 | Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface | Shigeo Moriyama, Tatuharu Yamamoto, Fumihiko Uchida | 1997-05-13 |
| 5609511 | Polishing method | Shigeo Moriyama, Yoshio Homma, Kikuo Kusukawa, Takeshi Furusawa | 1997-03-11 |
| 5601686 | Wafer transport method | Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama, Eiichi Murakami +2 more | 1997-02-11 |