Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689494 | Surface atom fabrication method and apparatus | Masakazu Ichikawa, Shigeyuki Hosoki, Shigeo Kato, Yoshihisa Fujisaki, Sumiko Fujisaki +5 more | 1997-11-18 |
| 5628828 | Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface | Yoshio Kawamura, Shigeo Moriyama, Tatuharu Yamamoto | 1997-05-13 |
| 5601686 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Kenichi Mizuishi, Natsuki Yokoyama, Eiichi Murakami +2 more | 1997-02-11 |