Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5628828 | Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface | Yoshio Kawamura, Shigeo Moriyama, Fumihiko Uchida | 1997-05-13 |