Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695897 | Alignment method and semiconductor exposure method | Noriyuki Mitome, Shigeyuki Uzawa | 1997-12-09 |
| 5689494 | Surface atom fabrication method and apparatus | Masakazu Ichikawa, Shigeyuki Hosoki, Fumihiko Uchida, Shigeo Kato, Yoshihisa Fujisaki +5 more | 1997-11-18 |
| 5601686 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama +2 more | 1997-02-11 |
| 5594549 | Position detecting method and projection exposure apparatus using the same | Tetsuya Mori, Hirohiko Shinonaga | 1997-01-14 |