Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5608218 | Scanning electron microscope | Mitsugu Sato, Yoichi Ose, Satoru Fukuhara, Makoto Ezumi | 1997-03-04 |
| 5598002 | Electron beam apparatus | Tadashi Otaka, Tatsuya Maeda, Katsuhiro Sasada | 1997-01-28 |
| 5594245 | Scanning electron microscope and method for dimension measuring by using the same | Kenji Takamoto, Tadashi Otaka, Fumio Mizuno, Satoru Yamada, Sadao Terakado +3 more | 1997-01-14 |
| 5594246 | Method and apparatus for x-ray analyses | Yoshimi Sudo, Tokuo Kure, Ken Ninomiya, Katsuhiro Kuroda, Takashi Nishida +2 more | 1997-01-14 |