Issued Patents 1997
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5699153 | Method and apparatus for optical inspection | Kanji Nishii, Masami Ito, Atsushi Fukui | 1997-12-16 |
| 5696373 | Optical encoder with dual diffraction grating | Atsushi Fukui, Kanji Nishii, Masami Ito | 1997-12-09 |
| 5696374 | Optical encoder using doubled diffraction angle based on first and second diffraction gratings | Atsushi Fukui, Kanji Nishii, Masami Ito | 1997-12-09 |
| 5694218 | Optical encoder including a plurality of phase adjusting gratings | Atsushi Fukui, Kanji Nishii, Masami Ito, Kazumasa Takata | 1997-12-02 |
| 5661295 | Optical encoder with dual diffraction gratings | Atsushi Fukui, Kanji Nishii, Masami Ito | 1997-08-26 |
| 5627678 | Fourier transform optical apparatus and optical information | Kanji Nishii, Masami Ito, Atsushi Fukui | 1997-05-06 |
| 5594245 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Tadashi Otaka, Fumio Mizuno, Satoru Yamada, Sadao Terakado +3 more | 1997-01-14 |