Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614713 | Scanning electron microscope | Atsushi Kobaru, Tatsuya Maeda, Katsuhiro Sasada | 1997-03-25 |
| 5598002 | Electron beam apparatus | Hideo Todokoro, Tatsuya Maeda, Katsuhiro Sasada | 1997-01-28 |
| 5594245 | Scanning electron microscope and method for dimension measuring by using the same | Hideo Todokoro, Kenji Takamoto, Fumio Mizuno, Satoru Yamada, Sadao Terakado +3 more | 1997-01-14 |