Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700620 | Radiation ray sensitive resin compostion containing at least two different naphthoquinonediazide sulfonic acid esters and an alkali-soluble low-molecular compound | Shinji Sakaguchi, Kenichiro Sato | 1997-12-23 |
| 5693452 | Positive chemically amplified resist composition | Toru Fujimori | 1997-12-02 |
| 5683856 | Positive-working photosensitive composition | Tsukasa Yamanaka, Kazuya Uenishi | 1997-11-04 |
| 5609982 | Positive-working photoresist composition | Kenichiro Sato, Yasumasa Kawabe, Shinji Sakaguchi | 1997-03-11 |