Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614248 | Method for plasma-assisted reactive electron beam vaporization | Siegfried Schiller, Manfred Neumann, Gerhard Zeissig, Nicolas Schiller, Klaus Goedicke | 1997-03-25 |
| 5614273 | Process and apparatus for plasma-activated electron beam vaporization | Klaus Goedicke, Bert Scheffel, Jonathan Reschke, Siegfried Schiller, Torsten Werner | 1997-03-25 |