Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5657768 | Cigarette tube filling device | Josef Lier | 1997-08-19 |
| 5635087 | Apparatus for plasma-assisted high rate electron beam vaporization | Siegfried Schiller, Henry Morgner | 1997-06-03 |
| 5614248 | Method for plasma-assisted reactive electron beam vaporization | Siegfried Schiller, Volker Kirchhoff, Gerhard Zeissig, Nicolas Schiller, Klaus Goedicke | 1997-03-25 |