Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614248 | Method for plasma-assisted reactive electron beam vaporization | Siegfried Schiller, Manfred Neumann, Volker Kirchhoff, Gerhard Zeissig, Klaus Goedicke | 1997-03-25 |
NS
Nicolas Schiller
Overall (1997): #98,771 of 185,788Top 55%
1
Patents 1997