Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614273 | Process and apparatus for plasma-activated electron beam vaporization | Klaus Goedicke, Bert Scheffel, Jonathan Reschke, Siegfried Schiller, Volker Kirchhoff | 1997-03-25 |