Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688717 | Construction that prevents the undercut of interconnect lines in plasma metal etch systems | Lewis Shen, Mark S. Chang, Robin Cheung | 1997-11-18 |
| 5675186 | Construction that prevents the undercut of interconnect lines in plasma metal etch systems | Lewis Shen, Mark S. Chang, Robin Cheung | 1997-10-07 |