Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702978 | Sloped silicon nitride etch for smoother field oxide edge | Olivier Laparra | 1997-12-30 |
| 5639697 | Dummy underlayers for improvement in removal rate consistency during chemical mechanical polishing | Milind Weling, Subhas Bothra | 1997-06-17 |
| 5638006 | Method and apparatus for wafer level prediction of thin oxide reliability using differentially sized gate-like antennae | Subhash R. Nariani | 1997-06-10 |