Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5653622 | Chemical mechanical polishing system and method for optimization and control of film removal uniformity | Charles Franklin Drill | 1997-08-05 |
| 5639697 | Dummy underlayers for improvement in removal rate consistency during chemical mechanical polishing | Subhas Bothra, Calvin T. Gabriel | 1997-06-17 |
| 5618757 | Method for improving the manufacturability of the spin-on glass etchback process | Subhas Bothra | 1997-04-08 |