Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639697 | Dummy underlayers for improvement in removal rate consistency during chemical mechanical polishing | Milind Weling, Calvin T. Gabriel | 1997-06-17 |
| 5618757 | Method for improving the manufacturability of the spin-on glass etchback process | Milind Weling | 1997-04-08 |
| 5597668 | Patterned filled photo mask generation for integrated circuit manufacturing | Edward D. Nowak, David Eatock, Wesley R. Erck | 1997-01-28 |