Issued Patents 1994
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5377071 | Sensor apparatus and method for real-time in-situ measurements of sheet resistance and its uniformity pattern in semiconductor processing equipment | — | 1994-12-27 |
| 5373184 | SOI/semiconductor heterostructure fabrication by wafer bonding | — | 1994-12-13 |
| 5372969 | Low-RC multi-level interconnect technology for high-performance integrated circuits | — | 1994-12-13 |
| 5367606 | Multi-zone illuminator with embedded process control sensors | Robert T. Matthews, Cecil J. Davis | 1994-11-22 |
| 5354443 | Method and apparatus for physical-vapor deposition of material layers | — | 1994-10-11 |
| 5326170 | Wireless temperature calibration device and method | Habib N. Najm, Lino Velo | 1994-07-05 |
| 5322809 | Self-aligned silicide process | — | 1994-06-21 |
| 5321298 | Soi wafer fabrication by selective epitaxial growth | — | 1994-06-14 |
| 5317656 | Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry | Habib N. Najm | 1994-05-31 |
| 5305417 | Apparatus and method for determining wafer temperature using pyrometry | Habib N. Najm, Somnath Banerjee, Lino Velo | 1994-04-19 |
| 5296385 | Conditioning of semiconductor wafers for uniform and repeatable rapid thermal processing | John W. Kuehne, Lino Velo | 1994-03-22 |
| 5293216 | Sensor for semiconductor device manufacturing process control | — | 1994-03-08 |
| 5286297 | Multi-electrode plasma processing apparatus | Cecil J. Davis, John I. Jones, Robert T. Matthews | 1994-02-15 |
| 5284804 | Global planarization process | — | 1994-02-08 |
| 5275976 | Process chamber purge module for semiconductor processing equipment | — | 1994-01-04 |