Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5345534 | Semiconductor wafer heater with infrared lamp module with light blocking means | Steve S. Huang, Cecil J. Davis, Robert T. Matthews | 1994-09-06 |
| 5326170 | Wireless temperature calibration device and method | Mehrdad M. Moslehi, Lino Velo | 1994-07-05 |
| 5317656 | Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry | Mehrdad M. Moslehi | 1994-05-31 |
| 5305417 | Apparatus and method for determining wafer temperature using pyrometry | Mehrdad M. Moslehi, Somnath Banerjee, Lino Velo | 1994-04-19 |