Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5326170 | Wireless temperature calibration device and method | Mehrdad M. Moslehi, Habib N. Najm | 1994-07-05 |
| 5305417 | Apparatus and method for determining wafer temperature using pyrometry | Habib N. Najm, Mehrdad M. Moslehi, Somnath Banerjee | 1994-04-19 |
| 5296385 | Conditioning of semiconductor wafers for uniform and repeatable rapid thermal processing | Mehrdad M. Moslehi, John W. Kuehne | 1994-03-22 |