Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5367606 | Multi-zone illuminator with embedded process control sensors | Mehrdad M. Moslehi, Robert T. Matthews | 1994-11-22 |
| 5345534 | Semiconductor wafer heater with infrared lamp module with light blocking means | Habib N. Najm, Steve S. Huang, Robert T. Matthews | 1994-09-06 |
| 5286297 | Multi-electrode plasma processing apparatus | Mehrdad M. Moslehi, John I. Jones, Robert T. Matthews | 1994-02-15 |