Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5345145 | Method and apparatus for generating highly dense uniform plasma in a high frequency electric field | Kenji Harafuji, Mitsuhiro Ohkuni, Tokuhiko Tamaki, Noboru Nomura | 1994-09-06 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Kenji Harafuji, Tokuhiko Tamaki, Mitsuhiro Ohkuni, Noboru Nomura, Ichiro Nakayama | 1994-07-26 |
| 5330606 | Plasma source for etching | Noboru Nomura, Tokuhiko Tamaki | 1994-07-19 |
| 5324388 | Dry etching method and dry etching apparatus | Atsuhiro Yamano, Kenji Harafuji | 1994-06-28 |
| 5312776 | Method of preventing the corrosion of metallic wirings | Tomoyasu Murakami, Michinari Yamanaka, Kousaku Yano, Masayuki Endo, Noboru Nomura +3 more | 1994-05-17 |