Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5345145 | Method and apparatus for generating highly dense uniform plasma in a high frequency electric field | Kenji Harafuji, Mitsuhiro Ohkuni, Masafumi Kubota, Noboru Nomura | 1994-09-06 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Masafumi Kubota, Kenji Harafuji, Mitsuhiro Ohkuni, Noboru Nomura, Ichiro Nakayama | 1994-07-26 |
| 5330606 | Plasma source for etching | Masafumi Kubota, Noboru Nomura | 1994-07-19 |
| 5318668 | Dry etching method | Shinichi Imai, Tadashi Kimura, Yoshimasa Inamoto | 1994-06-07 |
| 5296095 | Method of dry etching | Yutaka Nabeshima | 1994-03-22 |