Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5360106 | Method for transporting/storing wafer and wafer carrier | Masuo Tanno, Kazuhiro Mori | 1994-11-01 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Masafumi Kubota, Kenji Harafuji, Tokuhiko Tamaki, Mitsuhiro Ohkuni, Noboru Nomura | 1994-07-26 |