Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5345145 | Method and apparatus for generating highly dense uniform plasma in a high frequency electric field | Mitsuhiro Ohkuni, Tokuhiko Tamaki, Masafumi Kubota, Noboru Nomura | 1994-09-06 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Masafumi Kubota, Tokuhiko Tamaki, Mitsuhiro Ohkuni, Noboru Nomura, Ichiro Nakayama | 1994-07-26 |
| 5324388 | Dry etching method and dry etching apparatus | Atsuhiro Yamano, Masafumi Kubota | 1994-06-28 |