Issued Patents 1994
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370769 | Dry etching method of GaAs | Junichi Sato | 1994-12-06 |
| 5366590 | Dry etching method | — | 1994-11-22 |
| 5360510 | Dry etching method | — | 1994-11-01 |
| 5354421 | Dry etching method | Tetsuya Tatsumi, Tetsuji Nagayama | 1994-10-11 |
| 5342481 | Dry etching method | — | 1994-08-30 |
| 5326431 | Dry etching method utilizing (SN).sub.x polymer mask | — | 1994-07-05 |
| 5320708 | Dry etching method | Masakazu Muroyama | 1994-06-14 |
| 5314576 | Dry etching method using (SN).sub.x protective layer | — | 1994-05-24 |
| 5312518 | Dry etching method | — | 1994-05-17 |
| 5310456 | Dry etching method | — | 1994-05-10 |
| 5281304 | Process for forming copper wiring | — | 1994-01-25 |