Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368686 | Dry etching method for W polycide using sulfur deposition | Tetsuya Tatsumi | 1994-11-29 |
| 5369061 | Method of producing semiconductor device using a hydrogen-enriched layer | — | 1994-11-29 |
| 5354421 | Dry etching method | Tetsuya Tatsumi, Shingo Kadomura | 1994-10-11 |