Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368686 | Dry etching method for W polycide using sulfur deposition | Tetsuji Nagayama | 1994-11-29 |
| 5362361 | Dry etching method | — | 1994-11-08 |
| 5354421 | Dry etching method | Shingo Kadomura, Tetsuji Nagayama | 1994-10-11 |