Issued Patents 1994
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374591 | Method of making a metal plug | Toshiaki Hasegawa | 1994-12-20 |
| 5370769 | Dry etching method of GaAs | Shingo Kadomura | 1994-12-06 |
| 5360912 | Process of producing iminothiazoline derivatives | Shinichi Kawamura, Yuzuru Sanemitsu | 1994-11-01 |
| 5350736 | Iminothiazolines, their production and use as herbicides, and intermediates for their production | Shinichi Kawamura, Keiichi Izumi, Yuzuru Sanemitsu, Ryo Sato, Tatsuhiro Hamada +1 more | 1994-09-27 |
| 5349108 | 5-substituted-2,4-diphenylpyrimidine derivatives, their production and use | Yuzuru Sanemitsu, Shinichi Kawamura, Nobuaki Mito, Tatsuhiro Hamada, Ryo Yoshida | 1994-09-20 |
| 5326404 | Plasma processing apparatus | — | 1994-07-05 |
| 5292715 | Iminothiazolines, their production and use as herbicides | Shinichi Kawamura, Keiichi Izumi, Yuzuru Sanemitsu, Ryo Sato, Tatsuhiro Hamada +1 more | 1994-03-08 |
| 5288952 | Multilayer connector | Keiji Shinohara | 1994-02-22 |
| 5286296 | Multi-chamber wafer process equipment having plural, physically communicating transfer means | Toshiaki Hasegawa, Hiroshi Komatsu | 1994-02-15 |
| 5284799 | Method of making a metal plug | — | 1994-02-08 |
| 5277757 | Dry etching method | — | 1994-01-11 |