Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5317836 | Apparatus for polishing chamfers of a wafer | Masayuki Yamada, Hiroshi Kawano, Tatsuo Ohtani | 1994-06-07 |
| 5316620 | Method and an apparatus for polishing wafer chamfers | Tatsuo Ohtani, Hiroshi Kawano, Masayuki Yamada | 1994-05-31 |
| 5298111 | Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum | Tatsuya Yamamoto, Shinji Sato | 1994-03-29 |
| 5282289 | Scrubber apparatus for cleaning a thin disk work | Makoto Tsukada, Hideo Kudo, Masayuki Yamada, Isao Uchiyama | 1994-02-01 |