Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5298111 | Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum | Fumihiko Hasegawa, Shinji Sato | 1994-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5298111 | Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum | Fumihiko Hasegawa, Shinji Sato | 1994-03-29 |