Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5317836 | Apparatus for polishing chamfers of a wafer | Fumihiko Hasegawa, Masayuki Yamada, Hiroshi Kawano | 1994-06-07 |
| 5316620 | Method and an apparatus for polishing wafer chamfers | Fumihiko Hasegawa, Hiroshi Kawano, Masayuki Yamada | 1994-05-31 |