Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5317778 | Automatic cleaning apparatus for wafers | Isao Uchiyama, Yoshiharu Kimura, Morie Suzuki, Takashi Tanakajima | 1994-06-07 |
| 5282289 | Scrubber apparatus for cleaning a thin disk work | Fumihiko Hasegawa, Makoto Tsukada, Masayuki Yamada, Isao Uchiyama | 1994-02-01 |